Abstract
A method using reflected impedance to determine the electrical degradation rates of bioresorbable metals for physically transient electronic devices is outlined. This approach uses known mutual inductor interactions with simple single turn disk coil geometries and a frequency measurement system to track the reduction of the mean thickness of a thin film metal ring as it degrades. Experiments using 500nm thick zinc rings, fabricated by photolithography, thermal evaporation and liftoff, found a mean degradation rate of 278nm h-1 in 37 ∘C deionised water. Experiments in 37 ∘C 1 mM hydrochloric acid found two distinct periods of degradation and a total degradation rate of 632nm h-1 that closely matched the degradation rate measured using profilometry of 608nm h-1.
Original language | English |
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Article number | 9944891 |
Number of pages | 8 |
Journal | IEEE Transactions on Semiconductor Manufacturing |
Volume | 36 |
Issue number | 1 |
Early online date | 10 Nov 2022 |
DOIs | |
Publication status | Published - Feb 2023 |
Keywords
- Corrosion testing
- Impedance measurement
- implantable devices
- Metallisation
- Thin film