Wireless measurement of the degradation rates of thin film bioresorbable metals using reflected impedance

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Abstract

A method using reflected impedance to determine the electrical degradation rates of bioresorbable metals for physically transient electronic devices is outlined. This approach uses known mutual inductor interactions with simple single turn disk coil geometries and a frequency measurement system to track the reduction of the mean thickness of a thin film metal ring as it degrades. Experiments using 500nm thick zinc rings, fabricated by photolithography, thermal evaporation and liftoff, found a mean degradation rate of 278nm h-1 in 37 ∘C deionised water. Experiments in 37 C 1 mM hydrochloric acid found two distinct periods of degradation and a total degradation rate of 632nm h-1 that closely matched the degradation rate measured using profilometry of 608nm h-1.
Original languageEnglish
Article number9944891
Number of pages8
JournalIEEE Transactions on Semiconductor Manufacturing
Volume36
Issue number1
Early online date10 Nov 2022
DOIs
Publication statusPublished - Feb 2023

Keywords

  • Corrosion testing
  • Impedance measurement
  • implantable devices
  • Metallisation
  • Thin film

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